MORClient/MorClient202403027/RS.Model/RecipeInDetail.cs

using System;
using System.Collections.Generic;
using System.Linq;
using System.Text;
using System.Threading.Tasks;

namespace RS.Model
{
    /// <summary>
    /// 配方下  详细的步骤
    /// </summary>
    public class RecipeInDetail
    {
        /// <summary>
        /// 步骤
        /// </summary>
        public int step { get; set; }
        /// <summary>
        /// 时间
        /// </summary>
        public float useTim { get; set; }
        /// <summary>
        /// 主轴转速
        /// </summary>
        public float spindleSpeed { get; set; }
        /// <summary>
        /// 加速度
        /// </summary>
        public float acceleration { get; set; }
        /// <summary>
        /// 擦洗臂配方
        /// </summary>
        public string scrubingArm { get; set; }
        /// <summary>
        /// 冲洗臂配方
        /// </summary>
        public string flushingArm { get; set; }
        /// <summary>
        /// 高压水
        /// </summary>
        public string highPressureWater { get; set; }
        /// <summary>
        /// 晶圆冲洗
        /// </summary>
        public string waferFlushing { get; set; }
        /// <summary>
        /// 背气
        /// </summary>
        public string backQi { get; set; }
        /// <summary>
        /// 吹气
        /// </summary>
        public string blowQi { get; set; }
        /// <summary>
        /// 捕捉杯CUP
        /// </summary>
        public string captureCup { get; set; }
        /// <summary>
        /// SCR配方名称
        /// </summary>
        public string scrRecipeName { get; set; }
        /// <summary>
        /// 创建人
        /// </summary>
        public string founder { get; set; }
        /// <summary>
        /// 创建时间
        /// </summary>
        public string foundTime { get; set; }
        /// <summary>
        /// 预压位置
        /// </summary>
        public float prePressingPosition { get; set; }
        /// <summary>
        /// 擦片主轴转速
        /// </summary>
        public float wipeSpindleSpeed { get; set; }
        /// <summary>
        /// 擦片扭矩限制
        /// </summary>
        public UInt32 wipeTorqueLimit { get; set; }
        /// <summary>
        /// 机台名称 SCR1 SCR2 SCR3  SCR4
        /// </summary>
        public string  scr_machine { get; set; }
    }
}