|
|
using System;
|
|
|
using System.Collections.Generic;
|
|
|
using System.Linq;
|
|
|
using System.Text;
|
|
|
using System.Threading.Tasks;
|
|
|
|
|
|
namespace RS.Model.JsonModel
|
|
|
{
|
|
|
/// <summary>
|
|
|
/// SVID对象类
|
|
|
/// </summary>
|
|
|
public class MSvid
|
|
|
{
|
|
|
/// <summary>
|
|
|
/// Clock
|
|
|
/// </summary>
|
|
|
public string Clock { get; set; }
|
|
|
|
|
|
/// <summary>
|
|
|
/// 登录用户类型:0:Process 1:Operate 2:Admin
|
|
|
/// </summary>
|
|
|
public short LoginUserType { get; set; }
|
|
|
|
|
|
/// <summary>
|
|
|
/// 设备Id
|
|
|
/// </summary>
|
|
|
public string EquipmentId { get; set; }
|
|
|
|
|
|
/// <summary>
|
|
|
/// 通讯状态 0:Not Communication 1:Communicating
|
|
|
/// </summary>
|
|
|
public short CommunicationState { get; set; }
|
|
|
|
|
|
/// <summary>
|
|
|
/// 控制状态:0:Offline 1:OnlineLocal 2:OnlineRemote
|
|
|
/// </summary>
|
|
|
public short ControlStae { get; set; }
|
|
|
|
|
|
/// <summary>
|
|
|
/// 配方运行状态:1:Stopped 2:Idle 3:Running 4:Pause 5:Hold
|
|
|
/// 6:Abort 中止 7:Completed
|
|
|
/// </summary>
|
|
|
public short ProcessState { get; set; }
|
|
|
|
|
|
/// <summary>
|
|
|
/// CS1配方名称
|
|
|
/// </summary>
|
|
|
public string CS1PPExecuteName { get; set; }
|
|
|
|
|
|
/// <summary>
|
|
|
/// CS1 Lotid
|
|
|
/// </summary>
|
|
|
public string CS1LOTID { get; set; }
|
|
|
|
|
|
/// <summary>
|
|
|
/// CS1产品ID
|
|
|
/// </summary>
|
|
|
public string CS1ProductID { get; set; }
|
|
|
|
|
|
/// <summary>
|
|
|
/// CS1操作员ID
|
|
|
/// </summary>
|
|
|
public string CS1OperatorID { get; set; }
|
|
|
|
|
|
/// <summary>
|
|
|
/// CS2配方名称
|
|
|
/// </summary>
|
|
|
public string CS2PPExecuteName { get; set; }
|
|
|
|
|
|
/// <summary>
|
|
|
/// CS2 LOTID
|
|
|
/// </summary>
|
|
|
public string CS2LOTID { get; set; }
|
|
|
|
|
|
/// <summary>
|
|
|
/// CS2产品ID
|
|
|
/// </summary>
|
|
|
public string CS2ProductID { get; set; }
|
|
|
|
|
|
/// <summary>
|
|
|
/// CS2 操作员ID
|
|
|
/// </summary>
|
|
|
public string CS2OperatorID { get; set; }
|
|
|
|
|
|
/// <summary>
|
|
|
/// SCR1主轴转速
|
|
|
/// </summary>
|
|
|
public double SCR1SpindleSpeed { get; set; }
|
|
|
|
|
|
/// <summary>
|
|
|
/// SCR2主轴转速
|
|
|
/// </summary>
|
|
|
public double SCR2SpindleSpeed { get; set; }
|
|
|
|
|
|
/// <summary>
|
|
|
/// SCR3主轴转速
|
|
|
/// </summary>
|
|
|
public double SCR3SpindleSpeed { get; set; }
|
|
|
|
|
|
/// <summary>
|
|
|
/// SCR4主轴转速
|
|
|
/// </summary>
|
|
|
public double SCR4SpindleSpeed { get; set; }
|
|
|
|
|
|
|
|
|
/// <summary>
|
|
|
/// CS1 晶圆合格数量
|
|
|
/// </summary>
|
|
|
public ushort CS1WaferPassNum { get; set; }
|
|
|
|
|
|
/// <summary>
|
|
|
/// CS1 晶圆不合格数量
|
|
|
/// </summary>
|
|
|
public ushort CS1WaferNGNum { get; set; }
|
|
|
|
|
|
/// <summary>
|
|
|
/// CS2 晶圆合格数量
|
|
|
/// </summary>
|
|
|
public ushort CS2WaferPassNum { get; set; }
|
|
|
|
|
|
/// <summary>
|
|
|
/// CS2 晶圆不合格数量
|
|
|
/// </summary>
|
|
|
public ushort CS2NGPassNum { get; set; }
|
|
|
|
|
|
/// <summary>
|
|
|
/// 系统产量
|
|
|
/// </summary>
|
|
|
public uint SystemYield { get; set; }
|
|
|
|
|
|
/// <summary>
|
|
|
/// SCR1擦洗臂速度 上下
|
|
|
/// </summary>
|
|
|
public double SCR1ScrubSpeed { get; set; }
|
|
|
|
|
|
/// <summary>
|
|
|
/// SCR2擦洗臂速度 上下
|
|
|
/// </summary>
|
|
|
public double SCR2ScrubSpeed { get; set; }
|
|
|
|
|
|
/// <summary>
|
|
|
/// SCR3擦洗臂速度 上下
|
|
|
/// </summary>
|
|
|
public double SCR3ScrubSpeed { get; set; }
|
|
|
|
|
|
/// <summary>
|
|
|
/// SCR4擦洗臂速度 上下
|
|
|
/// </summary>
|
|
|
public double SCR4ScrubSpeed { get; set; }
|
|
|
|
|
|
|
|
|
public int MessageID { get; set; }
|
|
|
public string MessageToHost { get; set; }
|
|
|
|
|
|
|
|
|
}
|
|
|
}
|